diff --git a/board/atmel/atstk1000/flash.c b/board/atmel/atstk1000/flash.c
index 4d380f3faca2436f02d8eb7a35dbfb103664719b..0ba06ddc5d87f9f56ff451a06254d72462745fa1 100644
--- a/board/atmel/atstk1000/flash.c
+++ b/board/atmel/atstk1000/flash.c
@@ -22,7 +22,7 @@
 #include <common.h>
 
 #ifdef CONFIG_ATSTK1000_EXT_FLASH
-#include <asm/cacheflush.h>
+#include <asm/arch/cacheflush.h>
 #include <asm/io.h>
 #include <asm/sections.h>
 
diff --git a/board/earthlcd/favr-32-ezkit/flash.c b/board/earthlcd/favr-32-ezkit/flash.c
index 5f73ff04df12a93e5b17e734e5e51db6db12ce58..0a2614667a2443a25a42b343bae8df6cea3aed22 100644
--- a/board/earthlcd/favr-32-ezkit/flash.c
+++ b/board/earthlcd/favr-32-ezkit/flash.c
@@ -20,7 +20,7 @@
 #include <common.h>
 
 #ifdef CONFIG_FAVR32_EZKIT_EXT_FLASH
-#include <asm/cacheflush.h>
+#include <asm/arch/cacheflush.h>
 #include <asm/io.h>
 #include <asm/sections.h>
 
diff --git a/cpu/at32ap/cache.c b/cpu/at32ap/cache.c
index 16a0565df2d977bb31f957ede83fdeed2f88b342..28b945669afe982ef2beceb22dc785f756d9efbc 100644
--- a/cpu/at32ap/cache.c
+++ b/cpu/at32ap/cache.c
@@ -22,7 +22,7 @@
 
 #include <common.h>
 
-#include <asm/cacheflush.h>
+#include <asm/arch/cacheflush.h>
 
 void dcache_clean_range(volatile void *start, size_t size)
 {
diff --git a/include/asm-avr32/dma-mapping.h b/include/asm-avr32/dma-mapping.h
index 3b46fa3e62b906c8362d335b5b30b2178565b717..0be7804da389c7c42e0fef42429e3731e9879904 100644
--- a/include/asm-avr32/dma-mapping.h
+++ b/include/asm-avr32/dma-mapping.h
@@ -23,7 +23,7 @@
 #define __ASM_AVR32_DMA_MAPPING_H
 
 #include <asm/io.h>
-#include <asm/cacheflush.h>
+#include <asm/arch/cacheflush.h>
 
 enum dma_data_direction {
 	DMA_BIDIRECTIONAL	= 0,
diff --git a/lib_avr32/board.c b/lib_avr32/board.c
index 959375a48f173354c641cb6be89eec78793acfbf..57115df09bf8bc954bc89796892f7eb18b60160a 100644
--- a/lib_avr32/board.c
+++ b/lib_avr32/board.c
@@ -86,7 +86,7 @@ void *sbrk(ptrdiff_t increment)
 }
 
 #ifdef CONFIG_SYS_DMA_ALLOC_LEN
-#include <asm/cacheflush.h>
+#include <asm/arch/cacheflush.h>
 #include <asm/io.h>
 
 static unsigned long dma_alloc_start;